JPS6215566U - - Google Patents
Info
- Publication number
- JPS6215566U JPS6215566U JP10715985U JP10715985U JPS6215566U JP S6215566 U JPS6215566 U JP S6215566U JP 10715985 U JP10715985 U JP 10715985U JP 10715985 U JP10715985 U JP 10715985U JP S6215566 U JPS6215566 U JP S6215566U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- ion beam
- thin film
- film forming
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10715985U JPS6215566U (en]) | 1985-07-12 | 1985-07-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10715985U JPS6215566U (en]) | 1985-07-12 | 1985-07-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6215566U true JPS6215566U (en]) | 1987-01-30 |
Family
ID=30983181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10715985U Pending JPS6215566U (en]) | 1985-07-12 | 1985-07-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6215566U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63227769A (ja) * | 1987-03-18 | 1988-09-22 | Hitachi Ltd | 薄膜生成方法及びその装置 |
| JPS63250454A (ja) * | 1987-04-06 | 1988-10-18 | Hitachi Ltd | イオンミキシング方法及びその装置 |
-
1985
- 1985-07-12 JP JP10715985U patent/JPS6215566U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63227769A (ja) * | 1987-03-18 | 1988-09-22 | Hitachi Ltd | 薄膜生成方法及びその装置 |
| JPS63250454A (ja) * | 1987-04-06 | 1988-10-18 | Hitachi Ltd | イオンミキシング方法及びその装置 |